Investigation of non-hydrogenated DLC:Si prepared by cathodic arc
نویسندگان
چکیده
منابع مشابه
Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique
The properties of nitrogen doped tetrahedral amorphous carbon films prepared by the filtered cathodic vacuum arc technique have been studied. The doping species, nitrogen ions, were produced by an ion beam source. The nitrogen flow rate was varied from 0.5 to 10 sccm while keeping other deposition conditions constant. The nitrogen content in deposited films was determined by Rutherford backscat...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2003
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(02)00488-7